From MEMS to NEMS with carbon

Biosens Bioelectron. 2005 Apr 15;20(10):2181-7. doi: 10.1016/j.bios.2004.09.034.

Abstract

Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication approach to battery miniaturization, active DNA arrays and a wide variety of chemical and biological sensors. In C-MEMS, photoresist is patterned by photolithography and subsequently pyrolyzed at high-temperatures in an oxygen-free environment. We established that it is possible to use C-MEMS to create very high-aspect ratio carbon structures (e.g. posts with an aspect ratio >10), suspended carbon plates and suspended carbon nanowires (C-NEMS). By changing the lithography conditions, soft and hard baking times and temperatures, additives to the resist, pyrolysis time, temperature and environment, C-MEMS permits a wide variety of interesting new MEMS and NEMS applications that employ structures having a wide variety of shapes, resistivities and mechanical properties. We also demonstrate that arrays of high-aspect ratio carbon posts can be charged/discharged with Li and this enables the fabrication of a smart switchable array of batteries.

Publication types

  • Evaluation Study

MeSH terms

  • Biocompatible Materials / analysis
  • Biocompatible Materials / chemistry*
  • Biosensing Techniques / instrumentation
  • Biosensing Techniques / methods
  • Carbon / chemistry*
  • Crystallization / methods*
  • Electrochemistry / instrumentation
  • Electrochemistry / methods*
  • Nanotechnology / instrumentation
  • Nanotechnology / methods*
  • Nanotubes, Carbon / chemistry*
  • Nanotubes, Carbon / ultrastructure*
  • Photography / methods*
  • Surface Properties

Substances

  • Biocompatible Materials
  • Nanotubes, Carbon
  • Carbon