Single-layer graphene on Al2O3/Si substrate: better contrast and higher performance of graphene transistors

Nanotechnology. 2010 Jan 8;21(1):015705. doi: 10.1088/0957-4484/21/1/015705. Epub 2009 Nov 30.

Abstract

The fact that single-layer graphene can be visualized on 300 nm SiO(2)/Si substrate using an optical microscope has enabled the facile fabrication of single-layer graphene devices for fundamental studies and potential applications. Here we report on an Al(2)O(3)/Si substrate for the fabrication of graphene devices with better contrast and higher performance. Our studies show that the contrast of single-layer graphene on 72 nm Al(2)O(3)/Si substrate is much better than that of single-layer graphene on 300 nm SiO(2)/Si substrate. Moreover, the transconductance of single-layer graphene transistors on Al(2)O(3)/Si substrate shows a more than sevenfold increase, due to the smaller dielectric thickness and higher dielectric constant in a 72 nm Al(2)O(3) film. These studies demonstrate a new and superior substrate for the fabrication of graphene transistors, and are of significance for both fundamental studies and technological applications.

Publication types

  • Research Support, N.I.H., Extramural
  • Research Support, Non-U.S. Gov't

MeSH terms

  • Aluminum Oxide / chemistry*
  • Carbon / chemistry*
  • Electric Capacitance
  • Microscopy, Atomic Force
  • Microscopy, Electron, Scanning
  • Silicon / chemistry*
  • Transistors, Electronic*

Substances

  • Carbon
  • Aluminum Oxide
  • Silicon