Angle-resolved environmental X-ray photoelectron spectroscopy: a new laboratory setup for photoemission studies at pressures up to 0.4 Torr

F Mangolini; J Åhlund; G E Wabiszewski; V P Adiga; P Egberts; F Streller; K Backlund; P G Karlsson; B Wannberg; R W Carpick

doi:10.1063/1.4754127

Angle-resolved environmental X-ray photoelectron spectroscopy: a new laboratory setup for photoemission studies at pressures up to 0.4 Torr

Rev Sci Instrum. 2012 Sep;83(9):093112. doi: 10.1063/1.4754127.

Authors

F Mangolini¹, J Åhlund, G E Wabiszewski, V P Adiga, P Egberts, F Streller, K Backlund, P G Karlsson, B Wannberg, R W Carpick

Affiliation

¹ Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, 220 S. 33rd Street, Philadelphia, Pennsylvania 19104, USA.

PMID: 23020367
DOI: 10.1063/1.4754127

Abstract

The paper presents the development and demonstrates the capabilities of a new laboratory-based environmental X-ray photoelectron spectroscopy system incorporating an electrostatic lens and able to acquire spectra up to 0.4 Torr. The incorporation of a two-dimensional detector provides imaging capabilities and allows the acquisition of angle-resolved data in parallel mode over an angular range of 14° without tilting the sample. The sensitivity and energy resolution of the spectrometer have been investigated by analyzing a standard Ag foil both under high vacuum (10(-8) Torr) conditions and at elevated pressures of N(2) (0.4 Torr). The possibility of acquiring angle-resolved data at different pressures has been demonstrated by analyzing a silicon/silicon dioxide (Si/SiO(2)) sample. The collected angle-resolved spectra could be effectively used for the determination of the thickness of the native silicon oxide layer.