Design and experiment of multidimensional and subnanometer stage driven by spatially distributed piezoelectric ceramics

Fan Zhang; Qiangxian Huang; Chibin Zhang; Baolin Cheng; Rongjun Cheng; Liansheng Zhang; Hongli Li

doi:10.1063/5.0190638

Design and experiment of multidimensional and subnanometer stage driven by spatially distributed piezoelectric ceramics

Rev Sci Instrum. 2024 May 1;95(5):053702. doi: 10.1063/5.0190638.

Authors

Fan Zhang^{1

2}, Qiangxian Huang^{1

2}, Chibin Zhang^{1

2}, Baolin Cheng^{1

2}, Rongjun Cheng^{1

2}, Liansheng Zhang^{1

2}, Hongli Li^{1

2}

Affiliations

¹ School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei 230009, China.
² Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology, Hefei 230009, Anhui, China.

PMID: 38739424
DOI: 10.1063/5.0190638

Abstract

Multidimensional microdriving stage is one of the key components to realize precision driving and high-precision positioning. To meet nanometer displacement and positioning in the fields of micro-/nano-machining and precision testing, a new six-degree-of-freedom microdriving stage (6-DOF-MDS) of multilayer spatially distributed piezoelectric ceramic actuators (PZTs) is proposed and designed. The interior of the 6-DOF-MDS is a hollow design. The flexure hinge is used as the transmission mechanism, and the series-parallel hybrid driving of the corresponding PZTs achieves the microtranslation in the X, Y, and Z directions and the microrotation around the three axes of the microdriving stage, forming a microdisplacement mechanism with high rigidity and simple structure, which can realize the microfeed of 6-DOF. The force-displacement theory and lug boss structure optimization of the 6-DOF-MDS are analyzed, while the strength checking and natural frequency of the 6-DOF-MDS are also simulated by the finite element method. In addition, the real-time motion control system of the 6-DOF-MDS is designed based on Advanced RISC Machines. Through a series of verification experiments, the stroke and resolution results of the 6-DOF-MDS are obtained, where the displacements in the X, Y, and Z directions are 20.72, 20.02, and 37.60 μm, respectively. The resolution is better than 0.68 nm. The rotation angles around X, Y, and Z are 38.96″, 33.80″, and 27.87″, respectively, with an angular resolution of 0.063″. Relevant coupling experiments were also performed in this paper; in the full stroke linear running of X-axis, the maximum coupling displacements of the Y- and Z-axes are 1.04 and 0.17 μm, respectively, with the corresponding coupling rates of ∼5.0% and 0.8%. The maximum coupling angles for the X-, Y-, and Z-axes are 0.33″, 0.14″, and 2.30″, respectively. Considering the coupling of the 6-DOF-MDS, decoupling measures and specific mathematical models have also been proposed. The proposed multidimensional microdriving stage achieves subnanometer resolution and can be used for the precise positioning and attitude control of precision instruments at the nano-/subnanometer level.