Organosilanes are commonly utilized to attach bioreceptors to oxide surfaces. The deposition of such silane layers is especially challenging in nanoscale or nanoconfined devices, such as in nanopipettes, since rinsing off loosely bound silanes may not be possible due to geometric constrictions and because the thickness of multilayered silanes can cover or block nanoscale features. Furthermore, in electrochemical devices, the silane layers experience additional perturbations, such as electric migration and electroosmotic force. Despite its importance, there appears to be no consensus in the current literature on the optimal methodology for nanopipette silanization, with significant variations in reported conditions. Herein, we systematically investigate the reproducibility and stability of liquid- and vapor-phase deposited silane layers inside nanopipettes. Electrochemical monitoring of the changing internal silanized surface reveals that vapor-deposited APTES generates surface modifications with the highest reproducibility, while vapor-deposited APTMS generates surface modifications of the highest stability over a 24-hour time period. Practical issues of silanizing nanoconfined systems are highlighted, and the importance of carefully chosen silanization conditions to yield stable and reproducible monolayers is emphasized as an underappreciated aspect in the development of novel nanoscale systems.