Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process.
Sun Q, Tang J, Shen L, Lan J, Shen Z, Xiao J, Chen X, Zhang J, Wu Y, Xu J, Wang X.
Sun Q, et al. Among authors: shen l, shen z.
Micromachines (Basel). 2022 Jun 6;13(6):899. doi: 10.3390/mi13060899.
Micromachines (Basel). 2022.
PMID: 35744513
Free PMC article.