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Exploring the limits of N-type ultra-shallow junction formation.
Polley CM, Clarke WR, Miwa JA, Scappucci G, Wells JW, Jaeger DL, Bischof MR, Reidy RF, Gorman BP, Simmons M. Polley CM, et al. Among authors: scappucci g. ACS Nano. 2013 Jun 25;7(6):5499-505. doi: 10.1021/nn4016407. Epub 2013 May 30. ACS Nano. 2013. PMID: 23721101
Realization of atomically controlled dopant devices in silicon.
Ruess FJ, Pok W, Reusch TC, Butcher MJ, Goh KE, Oberbeck L, Scappucci G, Hamilton AR, Simmons MY. Ruess FJ, et al. Among authors: scappucci g. Small. 2007 Apr;3(4):563-7. doi: 10.1002/smll.200600680. Small. 2007. PMID: 17340667 No abstract available.
48 results