Polymer-assisted deposition of metal-oxide films

Nat Mater. 2004 Aug;3(8):529-32. doi: 10.1038/nmat1163. Epub 2004 Jul 18.

Abstract

Metal oxides are emerging as important materials for their versatile properties such as high-temperature superconductivity, ferroelectricity, ferromagnetism, piezoelectricity and semiconductivity. Metal-oxide films are conventionally grown by physical and chemical vapour deposition. However, the high cost of necessary equipment and restriction of coatings on a relatively small area have limited their potential applications. Chemical-solution depositions such as sol-gel are more cost-effective, but many metal oxides cannot be deposited and the control of stoichiometry is not always possible owing to differences in chemical reactivity among the metals. Here we report a novel process to grow metal-oxide films in large areas at low cost using polymer-assisted deposition (PAD), where the polymer controls the viscosity and binds metal ions, resulting in a homogeneous distribution of metal precursors in the solution and the formation of uniform metal-organic films. The latter feature makes it possible to grow simple and complex crack-free epitaxial metal-oxides.

Publication types

  • Evaluation Study

MeSH terms

  • Adsorption
  • Crystallization / methods*
  • Crystallography / methods
  • Feasibility Studies
  • Gases / chemistry
  • Manufactured Materials
  • Materials Testing / methods*
  • Membranes, Artificial
  • Metallurgy / methods*
  • Metals / chemistry
  • Molecular Conformation
  • Nanotechnology / methods*
  • Oxides / chemistry
  • Polymers / chemistry*
  • Surface Properties
  • Titanium / chemistry*

Substances

  • Gases
  • Membranes, Artificial
  • Metals
  • Oxides
  • Polymers
  • titanium dioxide
  • Titanium