The effect of mixed halogenation agent (polytrifluorochloroethylene (PTFCE)/hexachloroethane (C2Cl6)) on the vaporization of aluminium has been studied in electrothermal vaporization inductively coupled plasma atomic emission spectrometry (ETV-ICP-AES). The mixed halogenation agent hastens the vaporization of Al to the plasma at low temperature compared with individual halogenation agent, and the metallic material can be prevented affectively from forming in the furnace. The detection limit of this method was 0.12 ng with RSD of 3.8% (Al: 0.3 microg x mL(-1), n = 7). The analytical results of real samples were in good agreement with those of pheumatic nebulization (PN)-ICP-AES, and the recoveries were in the range of 94.1%-102.5%.