Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO3 Thin Film

Yushuai Liu; Kangfu Liu; Jiawei Li; Yang Li; Tao Wu

doi:10.3390/mi15040477

Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO₃ Thin Film

Micromachines (Basel). 2024 Mar 30;15(4):477. doi: 10.3390/mi15040477.

Authors

Yushuai Liu^{1

2

3}, Kangfu Liu^{1

2

3}, Jiawei Li^{1

2

3}, Yang Li^{1

2

3}, Tao Wu^{1

2

3}

Affiliations

¹ School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.
² Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
³ University of Chinese Academy of Sciences, Beijing 100864, China.

Abstract

This article presents lithium niobate (LiNbO₃) based on shear horizontal (SH0) resonators, utilizing a suspended structure, for radio frequency (RF) applications. It demonstrates the design, analysis, and fabrication of SH0 resonators based on a 36Y-cut LiNbO₃ thin film. The spurious-free SH0 resonator achieves an electromechanical coupling coefficient (kt2) of 42.67% and a quality factor (Q_r) of 254 at the wave-propagating orientation of 0° in the 36Y-cut plane.

Keywords: high electromechanical coupling coefficient; lithium niobate (LiNbO3); resonator; shear horizontal wave.

Grants and funding

LG-QS-202202-05/Lingang Laboratory under Grant