Berenschot EJW - Search Results

1

Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography.

Ni S, Berenschot EJW, Westerik PJ, de Boer MJ, Wolf R, Le-The H, Gardeniers HJGE, Tas NR. Ni S, et al. Among authors: berenschot ejw. Microsyst Nanoeng. 2020 Mar 23;6:25. doi: 10.1038/s41378-020-0134-6. eCollection 2020. Microsyst Nanoeng. 2020. PMID: 34567640 Free PMC article.

2

Electrokinetic pumping and detection of low-volume flows in nanochannels.

Mela P, Tas NR, Berenschot EJ, van Nieuwkasteele J, van den Berg A. Mela P, et al. Electrophoresis. 2004 Nov;25(21-22):3687-93. doi: 10.1002/elps.200406083. Electrophoresis. 2004. PMID: 15565691

3

Nanoimprint lithography for nanophotonics in silicon.

Bruinink CM, Burresi M, de Boer MJ, Segerink FB, Jansen HV, Berenschot E, Reinhoudt DN, Huskens J, Kuipers L. Bruinink CM, et al. Nano Lett. 2008 Sep;8(9):2872-7. doi: 10.1021/nl801615c. Epub 2008 Aug 12. Nano Lett. 2008. PMID: 18698727

4

Multi-silicon ridge nanofabrication by repeated edge lithography.

Zhao Y, Berenschot E, Jansen H, Tas N, Huskens J, Elwenspoek M. Zhao Y, et al. Nanotechnology. 2009 Aug 5;20(31):315305. doi: 10.1088/0957-4484/20/31/315305. Epub 2009 Jul 13. Nanotechnology. 2009. PMID: 19597243 Free article.

5

Micromechanically tuned ring resonator in silicon on insulator.

Kauppinen LJ, Abdulla SM, Dijkstra M, de Boer MJ, Berenschot E, Krijnen GJ, Pollnau M, de Ridder RM. Kauppinen LJ, et al. Opt Lett. 2011 Apr 1;36(7):1047-9. doi: 10.1364/OL.36.001047. Opt Lett. 2011. PMID: 21478978

6

Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever.

Abdulla SM, Kauppinen LJ, Dijkstra M, de Boer MJ, Berenschot E, Jansen HV, de Ridder RM, Krijnen GJ. Abdulla SM, et al. Opt Express. 2011 Aug 15;19(17):15864-78. doi: 10.1364/OE.19.015864. Opt Express. 2011. PMID: 21934949 Free article.

7

Cantilever arrays with self-aligned nanotips of uniform height.

Koelmans WW, Peters T, Berenschot E, de Boer MJ, Siekman MH, Abelmann L. Koelmans WW, et al. Nanotechnology. 2012 Apr 6;23(13):135301. doi: 10.1088/0957-4484/23/13/135301. Epub 2012 Mar 14. Nanotechnology. 2012. PMID: 22418861

8

3D nanofabrication of fluidic components by corner lithography.

Berenschot EJ, Burouni N, Schurink B, van Honschoten JW, Sanders RG, Truckenmuller R, Jansen HV, Elwenspoek MC, van Apeldoorn AA, Tas NR. Berenschot EJ, et al. Small. 2012 Dec 21;8(24):3823-31. doi: 10.1002/smll.201201446. Epub 2012 Aug 21. Small. 2012. PMID: 22907803

9

Wafer-scale fabrication of nanoapertures using corner lithography.

Burouni N, Berenschot E, Elwenspoek M, Sarajlic E, Leussink P, Jansen H, Tas N. Burouni N, et al. Nanotechnology. 2013 Jul 19;24(28):285303. doi: 10.1088/0957-4484/24/28/285303. Nanotechnology. 2013. PMID: 23792365

10

Elasto-Capillary Folding Using Stop-Programmable Hinges Fabricated by 3D Micro-Machining.

Legrain A, Berenschot EJ, Tas NR, Abelmann L. Legrain A, et al. PLoS One. 2015 May 19;10(5):e0125891. doi: 10.1371/journal.pone.0125891. eCollection 2015. PLoS One. 2015. PMID: 25992886 Free PMC article.

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