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Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices.
ACS Appl Nano Mater. 2022 Oct 28;5(10):15847-15854. doi: 10.1021/acsanm.2c04079. Epub 2022 Oct 12.
ACS Appl Nano Mater. 2022.
PMID: 36338331
Free PMC article.
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