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An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect.
Micromachines (Basel). 2023 Mar 31;14(4):802. doi: 10.3390/mi14040802.
Micromachines (Basel). 2023.
PMID: 37421036
Free PMC article.
The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an Optical Tunneling Measuring Transducer.
Barbin E, Nesterenko T, Koleda A, Shesterikov E, Kulinich I, Kokolov A, Perin A.
Barbin E, et al. Among authors: kokolov a.
Sensors (Basel). 2024 Jan 24;24(3):765. doi: 10.3390/s24030765.
Sensors (Basel). 2024.
PMID: 38339482
Free PMC article.
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